Electron Probe Micro Analyzer (EPMA)

Electron Probe Micro Analyzer (EPMA)

In an EPMA, a micro-volume of a sample is subjected to interaction with a focused electron beam (typical energy = 5-30 keV) and the X-ray photons emitted by the various elemental species are collected, and analyzed by suitable crystal detectors. Since the wavelengths of the emitted X-rays are characteristic of the elements in the sample, the chemical composition can be easily determined.



  Equipment Details

  Key Features

  Application Areas

 Model:SX 100

 Manufacturer:CAMECA, France

 Resolution:6 nm in Secondary electron images

 Operating parameters: 0.2 to 30 kV accelerating voltage and 10-5 to 10-12 A beam current


  • Fitted with 2 Wavelength Dispersive X-ray (WDX) spectrometers 
  • High sensitivity and stability with X-ray peak overlaps correction
  • Elements except H, He and Li can be detected and quantified up to 0.1wt.% in solid samples using WDX spectrometers


  • Geochemistry
  • Mineralogy
  • Geochronology
  • Physical metallurgy
  • Materials science including glass, ceramics, cements
  • Microelectronics


Last updated on : 14-06-2018 04:21:25pm