A 3D-profilometer is used to study the surface features such as roughness, topography and flatness. The NanoMap3D contact profiler has both fine and coarse range scans. Fine range uses piezo drive to move the probe (maximum of 500 µm x 500 µm) and generates high resolution 2D and 3D images. Coarse range uses stage scan to move the sample in X and Y directions (maximum of 50 mm x 50 mm) to generate the image.
Make: AEP Technologies 500 LS
Contact scanning mode: Stage scan, Piezo driver mode
Probe radius: 100 nm
Scan area limits: 100 μm x 100 μm to 50 mm x 50 mm
Maximum in Z axis: 5 μm (fine range), 500 μm (high range)
Vertical Resolution: > 1 nm
Stylus loading force: 1 – 100 mg