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S-based Accelerometer
Intellectural Property Rights (IPR): Major Plant Equipment and
The process/technology know-how Machinery Required
document is with (for validation):
Semi-Conductor Laboratory- Mohali Common semiconductor clean room
(SCL-Mohali) equipment with DRIE (Deep Reactive
Ion Etching) system
Level/ Scale of Development: TRL-5
Techno-Economics
Environmental Considerations, if Have potential for import substitution
any
See Specifications Technology Package
Commercialization Process/technology know-how
It is being planned with SCL
development and documentation
Major Raw Materials to be
Utilized Contact Details
Silicon MEMS technology
Director
CSIR-CEERI
Pilani
SS 20
Intellectural Property Rights (IPR): Major Plant Equipment and
The process/technology know-how Machinery Required
document is with (for validation):
Semi-Conductor Laboratory- Mohali Common semiconductor clean room
(SCL-Mohali) equipment with DRIE (Deep Reactive
Ion Etching) system
Level/ Scale of Development: TRL-5
Techno-Economics
Environmental Considerations, if Have potential for import substitution
any
See Specifications Technology Package
Commercialization Process/technology know-how
It is being planned with SCL
development and documentation
Major Raw Materials to be
Utilized Contact Details
Silicon MEMS technology
Director
CSIR-CEERI
Pilani
SS 20
