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S-based Accelerometer
Fabricated Accelerometer Sensors
(3” wafer and diced chips)
Accelerometer Module
Fabricated accelerometer sensor
(Top & Bottom view; TO header package)
Application
Strategic Sector
Salient Technical Features
Accelerometer range ± 4g (standard) ± 15g (standard)
± 100g
Shock survival ± 50g 5V
1% of FS
Bias voltage 5 V ~ 10 mV/V/g
(with amplification)
Non-linearity 1% of FS < 5% of FS
Piezoresistive
Sensitivity ~ 75 mV/V/g DC – 500 Hz
100 mg
(with amplification) -20 to 85 °C
Cross-axis sensitivity < 5% of FS SS 19
Transduction mechanism Piezoresistive
Bandwidth DC – 100 Hz
Resolution 10 mg
Temperature -20 to 85 °C
Fabricated Accelerometer Sensors
(3” wafer and diced chips)
Accelerometer Module
Fabricated accelerometer sensor
(Top & Bottom view; TO header package)
Application
Strategic Sector
Salient Technical Features
Accelerometer range ± 4g (standard) ± 15g (standard)
± 100g
Shock survival ± 50g 5V
1% of FS
Bias voltage 5 V ~ 10 mV/V/g
(with amplification)
Non-linearity 1% of FS < 5% of FS
Piezoresistive
Sensitivity ~ 75 mV/V/g DC – 500 Hz
100 mg
(with amplification) -20 to 85 °C
Cross-axis sensitivity < 5% of FS SS 19
Transduction mechanism Piezoresistive
Bandwidth DC – 100 Hz
Resolution 10 mg
Temperature -20 to 85 °C
