The facility uses an electron beam for illumination and imaging of various constituents in the material. The various imaging modes are Secondary electron (SE) and Back scattered electron (BSE) signals. The facility can also be used for morphology of surfaces such as in fractography studies. The equipment is also fitted with Energy Dispersive X-ray (EDX) Analyzer for composition analysis.
The EVO 18 can be used for microstructural examination of metals and alloys, ceramic materials etc.,. The instrument can be used for fractography, composition analysis using EDX, and linear measurements of various phases in the sample
The salient features of the equipment are given below.
- Resolution: 3 nm (with Tungsten emitter) / 2 nm (with LaB6 emitter) @ 30 kV (SE - Secondary Electron mode)
Acceleration Voltage: 0.2 to 30 kV - Magnification: < 5x to 1,000,000x
- Probe Current: 0.5 pA to 5 µA
SEM Make and Model: Carl Zeiss EVO18
EDX analyser Make: EDAX
