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zoceramic thin films and coatings
Monitoring (SHM) as transceiver of ¡¡ Implantable sensors (biocompat-
acousto ultrasonic waves, vibration ible materials)
and acoustic sensing and dynamic
strain measurements. ¡¡ Energy harvesting devices (battery-
less, wireless integrated sensors
Piezoceramic thin films in the systems)
thickness range 200 nm to 600
nm has been especially developed ¡¡ Accelerometers, Acoustic Sensors,
on Si/SiO2/Ti/Pt wafer for MEMS High frequency Acoustic Transduc-
and microsensor/microactuator es, Microphones and Micromirrors
applications. In the low dimensional
range a substantial enhancement in Salient Technical Features
the Piezoelectric property is achieved
through directional growth and ¡¡ Lower cost
domain engineering by indigenous ¡¡ Lower weight
process optimization. ¡¡ Less material
¡¡ Less processing
¡¡ Smaller size
¡¡ Higher integration
Year of Development: 2016 Level/Scale of Development:
TRL-6
Application Intellectural Property Rights (IPR) :
¡¡ Integrated sensors (MEMS devices, Indian Patent filed
FeRAM, IPDs) and Microsystems
(e.g. microfluidic, micro-pumps, Major Plant Equipment and
micro-valves) Machinery Required
¡¡ Inkjet heads Essential equipments for thin film
¡¡ NDT (high-frequency, ultra-resolu- processing and coatings, control
furnaces, Clean room and poling unit
tion imaging)
¡¡ U ncooled IR detectors Market Potential
¡¡ Autofocus
¡¡ SHM (Structural Health Monitor- Global market size about 26 Billion
USD
ing) in aeronautics, off-shore oil
platforms, wind turbines) AS 43
Monitoring (SHM) as transceiver of ¡¡ Implantable sensors (biocompat-
acousto ultrasonic waves, vibration ible materials)
and acoustic sensing and dynamic
strain measurements. ¡¡ Energy harvesting devices (battery-
less, wireless integrated sensors
Piezoceramic thin films in the systems)
thickness range 200 nm to 600
nm has been especially developed ¡¡ Accelerometers, Acoustic Sensors,
on Si/SiO2/Ti/Pt wafer for MEMS High frequency Acoustic Transduc-
and microsensor/microactuator es, Microphones and Micromirrors
applications. In the low dimensional
range a substantial enhancement in Salient Technical Features
the Piezoelectric property is achieved
through directional growth and ¡¡ Lower cost
domain engineering by indigenous ¡¡ Lower weight
process optimization. ¡¡ Less material
¡¡ Less processing
¡¡ Smaller size
¡¡ Higher integration
Year of Development: 2016 Level/Scale of Development:
TRL-6
Application Intellectural Property Rights (IPR) :
¡¡ Integrated sensors (MEMS devices, Indian Patent filed
FeRAM, IPDs) and Microsystems
(e.g. microfluidic, micro-pumps, Major Plant Equipment and
micro-valves) Machinery Required
¡¡ Inkjet heads Essential equipments for thin film
¡¡ NDT (high-frequency, ultra-resolu- processing and coatings, control
furnaces, Clean room and poling unit
tion imaging)
¡¡ U ncooled IR detectors Market Potential
¡¡ Autofocus
¡¡ SHM (Structural Health Monitor- Global market size about 26 Billion
USD
ing) in aeronautics, off-shore oil
platforms, wind turbines) AS 43
