Plasma immersion ion implantation

Plasma immersion ion implantation

It is an ion implantation process that modifies the surfaces using RF plasma for enhancing tribological properties. Samples with any shape and size can be processed by this technique. Oxygen, carbon and nitrogen ions have been implanted by PIII process on SS-304 and Ti alloys to enhance wear and hardness properties.




Base vacuum: 5.0 × 10-6 mbar

RF frequency: 13.56 MHz

Antenna: Inductive coupling

RF generator Power: 300 W

High voltage: 30 kV

Temperature: 850°C

Last updated on : 20-06-2018 01:37:13pm