Thermal stability of TiAlN/TiAlON/Si3N4 tandem absorbers prepared by ...

Thermal stability of TiAlN/TiAlON/Si3N4 tandem absorbers prepared by ...

Thermal stability of TiAlN/TiAlON/Si3N4 tandem absorbers prepared by reactive direct current magnetron sputtering, H.C. Barshilia, N. Selvakumar, K. S. Rajam, Journal of Vacuum Science and Technology, 25 (2007) 383,  doi: 10.1116/1.2699425


Last updated on : 11-01-2018 01:44:53pm