FESEM is an advanced version of scanning electron microscope which produces 1000 times brighter image than the conventional SEM. Schottky field emitter is used as a source in an ultrahigh vacuum chamber. The EDS system gives quantitative elemental information and Electron Backscattered Diffraction (EBSD) provides crystal structure and orientation of the sample.
Make: Supra 40 VP (Carl Zeiss), Germany Specifications:
pumps and one turbo- molecular pump (10-5 to 10-11 mBar).
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Last updated on : 11-05-2018 11:43:03am