Field Emission Scanning Electron Microscopy Integrated with EDS/EBSD

Field Emission Scanning Electron Microscopy Integrated with EDS/EBSD

FESEM is an advanced version of scanning electron microscope which produces 1000 times brighter image than the conventional SEM. Schottky field emitter is used as a source in an ultrahigh vacuum chamber. The EDS system gives quantitative elemental information and Electron Backscattered Diffraction (EBSD) provides crystal structure and orientation of the sample.

 

Make: Supra 40 VP (Carl Zeiss), Germany

Specifications:

  • Resolution: 1.0 nm at 20 kVA.
  • Variable pressure mode for non-conducting samples.
  • Vacuum: UHV compatible system with two ion

pumps and one turbo- molecular pump (10-5 to 10-11 mBar).

  • EDS for elemental detection down to B.
  • EBSD for mapping of nanocrystals of different orientations



Last updated on : 11-05-2018 11:43:03am